Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics

Scientific paper - Original scientific paper

• Author: Florian Hartmann
• Author: Marie Jakešová
• Author: Guoyong Mao
• Author: Marta Nikić
• Author: Martin Kaltenbrunner
• Author: Vedran Đerek
• Author: Eric Daniel Głowacki
• Author's institution: University of Zagreb; Faculty of Science; (Department of Physics)
• Scientific / art field, discipline and subdiscipline: NATURAL SCIENCES; Physics

Abstract (english)

Electronics implemented on biocompatible ultrathin substrates like polyethylene terephthalate, polyimide, or parylene enabled a wide range of conformable, lightweight smart wearables and implantables. However, applications in such dynamic environments require robust devices that adjust and stretch while maintaining their functionality. Universal approaches that unite scalable, low-cost fabrication with high performance and versatile, space-efficient design are sparse. Here, stretchable architectures of parylene enabled by Origami-inspired folds at the micrometer scale are demonstrated. Parylene is directly deposited onto anisotropically etched silicon molds to greatly reduce bending stress, allowing folds with bending radii of a few micrometers. 50-nm-thick gold conductors fabricated on the folded parylene facilitate electronics with a stretchability of up to 55% tensile strain. The conductors sustain a resistance below 20 Ω during reversible stretching of more than 10 000 cycles, enabling long-term operation in practical settings. This method presents a versatile tool for the microfabrication of stretchable devices with tunable properties.

• Keywords (english): microfabrication; parylene; flexible; stretchable
• Language: english
• Publication type: Scientific paper - Original scientific paper
• Publication status: Published
• Peer review: Peer review - international
• Publication version: Published version
• Journal title: Advanced Electronic Materials
• Numbering: vol. 7, no. 4, 2001236
• p-ISSN: 2199-160X
• e-ISSN: 2199-160X
• DOI: https://doi.org/10.1002/aelm.202001236
• URN:NBN: urn:nbn:hr:217:878029
• Publication: 2021-03-15
• Project: Number: UIP-2019-04-1753; Title (croatian): Mikro i nano-strukture za 3D opto-bioelektroniku; Title (english): Micro- and nano-structures for 3D opto-bioelectronics; Acronym: 3Doptobio; Leader: Vedran Đerek; Jurisdiction: Croatia; Funding stream: UIP
• Document URL: https://onlinelibrary.wiley.com/doi/10.1002/aelm.202001236
• Type of resource: Text
• Access conditions: Open access
• Public note: © 2021 The Authors. Advanced Electronic Materials published by Wiley-VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
• Created on: 2023-07-28 19:09:29