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doctoral thesis
2
1
Spatially and temporally resolved spectroscopic characterization of low pressure cold plasmas
Zlatko Kregar (2013)
University of Zagreb
Faculty of Science
Department of Physics
Cite this item:
https://urn.nsk.hr/urn:nbn:hr:217:819671
Metadata
Title
Prostorno i vremenski razlučiva spektroskopska karakterizacija niskotlačnih hladnih plazmi
Author
Zlatko Kregar
Mentor(s)
Slobodan Milošević
Abstract
U ovoj disertaciji predstavlja se izrada i primjena novog eksperimentalnog uređaja za obradu uzoraka pomoću induktivno vezane niskotlačne hladne plazme. Uređaj omogućuje praćenje i karakterizaciju procesa međudjelovanja hladne plazme s površinom uzorka. Primarna metoda karakterizacije je optička emisijska spektroskopija. Spektralne značajke plazme su prostorno i vremenski razlučene pomoću minijaturnih spektrometara. Spektralna karakterizacija plazme je uspoređena s mjerenjima koncentracije atoma pomoću katalitičkih sondi. Izmjereni parametri korišteni su za optimizaciju procesa međudjelovanja hladne plazme i uzorka, a posebna pozornost usmjerena je na istraživanje povratnog utjecaja uzorka na plazmu.
Keywords
optical emission spectroscopy
cold plasma
radio frequency inductively coupled plasma
atomic i molecular processes
Parallel title (English)
Spatially and temporally resolved spectroscopic characterization of low pressure cold plasmas
Committee Members
Slobodan Milošević
(committee chairperson)
Granter
University of Zagreb
Faculty of Science
Lower level organizational units
Department of Physics
Place
Zagreb
State
Croatia
Scientific field, discipline, subdiscipline
NATURAL SCIENCES
Physics
UDK
53
NATURAL SCIENCES
Physics
Study programme type
university
Study level
postgraduate
Study programme
Physics
Academic title abbreviation
dr. sc.
Genre
doctoral thesis
Language
Croatian
Defense date
2013-12-17
Parallel abstract (English)
This dissertation presents the development of a new experimental device for low pressure inductively coupled cold plasma sample processing. The device enables monitoring and characterization of the process of cold plasma interactions with the surface of the sample. Primary method of characterization is optical emission spectroscopy. Spectral characteristics of plasma are spatially and temporally resolved using miniature spectrometers. Spectral characterization of plasma is compared with measurements of the concentration of atoms with catalytic probes. The measured parameters are used to optimize the process of interaction between the cold plasma and the sample, and special attention is focused on the sample influence on plasma. Investigations included spatially resolved spectroscopy of oxygen, water vapour and hydrogen plasmas. Methane plasma and the deposition of amorphous carbon films and its subsequent removal by oxygen plasma was investigated by optical emission spectroscopy and pirometry. Numerous materials were introduced into various plasmas. These include: ammonia plasma and its effect on sodium hyaluronate (effects on the samples were analysed by XPS). Also, characteristics of oxygen plasma during treatment of polymer graphite composite were monitored by optical emission spectroscopy. Investigation of dental posts modification in hydrogen plasma was performed, where similar effect to classical methods in their pretreatment was achieved. Various polymers (PP, PVC, PTFE and many other) were monitored during plasma treatment by oxygen, hydrogen and argon plasmas. Oxygen plasma was also used in the treatment and modification of surface characteristics of cotton.
Parallel keywords (Croatian)
optička emisijska spektroskopija
hladna plazma
radio frekventna induktivno vezana plazma
atomski i molekulski procesi
Extent
146 str.
Version
accepted version
Resource type
text
Access condition
Open access
Terms of use
Note
accepted version
URN:NBN
https://urn.nsk.hr/urn:nbn:hr:217:819671
Committer
Iva Čizmin