Spatially and temporally resolved spectroscopic characterization of low pressure cold plasmas

doctoral thesis

• Title: Prostorno i vremenski razlučiva spektroskopska karakterizacija niskotlačnih hladnih plazmi
• Author: Zlatko Kregar
• Mentor: Slobodan Milošević (mentor)
• Committee member: Slobodan Milošević (predsjednik povjerenstva)
• Granter: University of Zagreb; Faculty of Science; (Department of Physics); Zagreb
• Defense date and country: 2013-12-17, Croatia
• Scientific / art field, discipline and subdiscipline: NATURAL SCIENCES; Physics
• Universal decimal classification (UDC): 53; NATURAL SCIENCES; Physics

Abstract

U ovoj disertaciji predstavlja se izrada i primjena novog eksperimentalnog uređaja za obradu uzoraka pomoću induktivno vezane niskotlačne hladne plazme. Uređaj omogućuje praćenje i karakterizaciju procesa međudjelovanja hladne plazme s površinom uzorka. Primarna metoda karakterizacije je optička emisijska spektroskopija. Spektralne značajke plazme su prostorno i vremenski razlučene pomoću minijaturnih spektrometara. Spektralna karakterizacija plazme je uspoređena s mjerenjima koncentracije atoma pomoću katalitičkih sondi. Izmjereni parametri korišteni su za optimizaciju procesa međudjelovanja hladne plazme i uzorka, a posebna pozornost usmjerena je na istraživanje povratnog utjecaja uzorka na plazmu.

Abstract (english)

This dissertation presents the development of a new experimental device for low pressure inductively coupled cold plasma sample processing. The device enables monitoring and characterization of the process of cold plasma interactions with the surface of the sample. Primary method of characterization is optical emission spectroscopy. Spectral characteristics of plasma are spatially and temporally resolved using miniature spectrometers. Spectral characterization of plasma is compared with measurements of the concentration of atoms with catalytic probes. The measured parameters are used to optimize the process of interaction between the cold plasma and the sample, and special attention is focused on the sample influence on plasma. Investigations included spatially resolved spectroscopy of oxygen, water vapour and hydrogen plasmas. Methane plasma and the deposition of amorphous carbon films and its subsequent removal by oxygen plasma was investigated by optical emission spectroscopy and pirometry. Numerous materials were introduced into various plasmas. These include: ammonia plasma and its effect on sodium hyaluronate (effects on the samples were analysed by XPS). Also, characteristics of oxygen plasma during treatment of polymer graphite composite were monitored by optical emission spectroscopy. Investigation of dental posts modification in hydrogen plasma was performed, where similar effect to classical methods in their pretreatment was achieved. Various polymers (PP, PVC, PTFE and many other) were monitored during plasma treatment by oxygen, hydrogen and argon plasmas. Oxygen plasma was also used in the treatment and modification of surface characteristics of cotton.

• Keywords: optička emisijska spektroskopija; hladna plazma; radio frekventna induktivno vezana plazma; atomski i molekulski procesi
• Keywords (english): optical emission spectroscopy; cold plasma; radio frequency inductively coupled plasma; atomic i molecular processes
• Language: croatian
• URN:NBN: urn:nbn:hr:217:819671
• Study programme: Title: Fizika; Study programme type: sveučilišni; Study level: poslijediplomski doktorski; Academic / professional title: doktor/doktorica znanosti, područje prirodnih znanosti, polje fizika (doktor/doktorica znanosti, područje prirodnih znanosti, polje fizika)
• Type of resource: Text
• Extent: 146 str.
• File origin: Born digital
• Access conditions: Open access
• Created on: 2017-08-23 09:12:38